“Entegris serves high technology markets by purifying, protecting and transporting critical materials used in manufacturing processes.” – From Jigsaw


Created as a spinoff of Millipore Corporation, Mykrolis (now Entegris) was faced with re-locating its substantial manufacturing facilities to new quarters. Although they acquired a facility with solid utility infrastructure, they required the addition of multiple manufacturing clean spaces, support laboratories and the relocation of hundreds of pieces of industrial equipment.  All of this needed to be accomplished in a fast track schedule of 6 months.


This project was delivered on a design/build basis, with a fast track focus due to client requirements. The project was delivered on schedule and within budget.

Project Highlights

  • Conversion of existing Class 10,000 clean rooms to Class 1000
  • Significant utilities and power installed to ceiling mounted “Patch Panels”
  • 75 GPM RODI system with trending system
  • Full service kitchen and cafeteria
  • 50 Hz power converter and distribution
  • Upgraded base building HVAC plant

Size & Budget

  • Contract basis design/build open book
  • Contract value $12 million
  • Total building size 200,000 SF
  • SPEC area renovated 109,000 SF
  • SPEC area built-out from shell 41,000 SF
  • Total area renovated 150,000 SF


  • Start Design February 1
  • Demolition Starts May 1
  • Construction Starts June 1
  • Phase I MFG First Move In August 19
  • Phase I MFG Move In Complete September 30
  • Phase II Laboratories Complete December 15
SPEC Process Engineering & Construction